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MEMSnet Home: MEMS-Talk: dry photoresist coating
dry photoresist coating
2004-05-11
Peng Yao
dry photoresist coating
Peng Yao
2004-05-11
Hi Everyone,
I am looking for photoresist that can be coated in a gas or liqid phase
without using solvent. I know some companys once produced products for
coating electrophorhetic resist using electroplating method. But they
stop their products for the cost reason. I am wondering if anyone know any
commercial available system can do this? Thanks!

Peng Yao
DOEs lab
Electrical Engineering Dept.
Univeristy of delaware
Newark D.E 19716


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