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MEMSnet Home: MEMS-Talk: rie etch mask for chrome
rie etch mask for chrome
2004-05-13
jo ed
rie etch mask for chrome
jo ed
2004-05-13
Hello all,

I was wondering if anyone new what a good rie etch
mask for chrome would be? I am currenlty etching 100
nm chrome in a cl/o2 plasma. Would nitride or oxide
work?

cheers,
j




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