Reflectivity Drift in Sputtered Aluminum Thin Films
PRAMOD GUPTA
2004-05-13
Does any one has experience in reflectivity drift in Sputtered Aluminum Thin
Films from 1st wafer to 25th wafer? If yes, what could be the possible reasons
for that?
(Pramod Gupta)
20800 Valley Green Dr., # 445
Cupertino, CA 95014
Phone: (408) 253-1646