this could originate from rising substrate temperature leading to bigger
grains.
Shay Kaplan

Original Message:
-----------------
From: PRAMOD GUPTA [email protected]
Date: Thu, 13 May 2004 09:55:07 -0700 (PDT)
To: [email protected]
Subject: [mems-talk] Reflectivity Drift in Sputtered Aluminum Thin Films


Does any one has experience in reflectivity drift in Sputtered Aluminum
Thin Films from 1st wafer to 25th wafer? If yes, what could be the possible
reasons for that?


(Pramod Gupta)

20800 Valley Green Dr., # 445

Cupertino, CA 95014

Phone: (408) 253-1646
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