Should be around 2.0.

--- Qing Yao  wrote:
> Hi,
>
>
> I was wondering if some one could tell me the
> typical value of refraction
> index of LPCVD Silicon Dioxide. It is deposited at
> about 420 degrees
> centigrade on a silicon wafer. I use a focus
> ellipsometer to measure its
> thickness. I tried 1.46 but got very large fit error
> (about 500). Please let
> me know if you have any information about this.
> Thanks!
>
>
> Best Regards,
>
>
> Qing Yao
> ___________________
> M&IE @ UIUC
>
>
> _______________________________________________
> [email protected] mailing list: to unsubscribe
> or change your list
> options, visit
>
http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS
> processing services.
> Visit us at http://www.memsnet.org/





__________________________________
Do you Yahoo!?
SBC Yahoo! - Internet access at a great low price.
http://promo.yahoo.com/sbc/