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MEMSnet Home: MEMS-Talk: refraction index of LPCVD silicon dioxide
refraction index of LPCVD silicon dioxide
2004-05-14
Qing Yao
2004-05-14
X. Yuan
2004-05-14
Shile
2004-05-17
Feridun Ay
2004-05-14
Michael D Martin
2004-05-15
Gert Eriksen
2004-05-17
Glenn Silveira
50 +/- 5 micron through hole in Pyrex wafer
2004-05-17
Patrick Roman
2004-05-18
Zheng Xia
2004-05-18
David Nemeth
refraction index of LPCVD silicon dioxide
Michael D Martin
2004-05-14
I think it might be around 1.7-2.0

-Mike


>>> [email protected] 5/14/2004 12:45:50 PM >>>
Hi,


I was wondering if some one could tell me the typical value of
refraction
index of LPCVD Silicon Dioxide. It is deposited at about 420 degrees
centigrade on a silicon wafer. I use a focus ellipsometer to measure
its
thickness. I tried 1.46 but got very large fit error (about 500).
Please let
me know if you have any information about this. Thanks!


Best Regards,


Qing Yao
___________________
M&IE @ UIUC


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