Hi Gabe,

I would suggest to add a thin layer of SiO2 on your Si wafer. This should solve
your problem if all of your SU-8 processing steps are correctly optimised to
your lab. environment.

regards

Han

>>Date:   Thu, 13 May 2004 17:31:43 -0400
>>From:   Gabriel Dagani  [add >>to address book]
[protect or block sender]
>>Subject:   [mems-talk] SU8 Adhesion to Si
>>To:   [email protected]
>>Reply To:   General MEMS discussion >[email protected]>

>>I am working on a process which involves multiple >>layers of
photolithography. After the first bake, I >>have problems with the adhesion of
the SU8 to the >>silicon. I heard that microchem has a adhesion >>promoter... is
there any other way?

>>thanks - Gabe





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