MEMS-talk:


What is the recommended process method to produce a 50 +/- 5 micron through
hole in a 1mm thick Pyrex wafer?  Dimensional tolerances and repeatability
are important to our design.


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Patrick Roman, M.S.
Microsystems Engineer
Code 553- Detector Systems Branch
Room E042 Building 11
NASA/ Goddard Space Flight Center
Greenbelt,MD 20771
phone: (301) 286-3558
fax: (301) 286-1672
mobile: (202) 294-8602
email: [email protected]