A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Au film
Au film
2004-05-17
Y.Yang
2004-05-18
WALTER Harald
Au film
WALTER Harald
2004-05-18
Hi Yongan,

try Ti instead of Cr, or use thinner Cr thickness (down to 2nm). Another
important factor for good film adhesion and smoothness is the coating technique.
In most cases sputtering is better than evaporation. Very good smoothness can be
obtained using negativ ion sputtering.

Harald




reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
The Branford Group
Process Variations in Microsystems Manufacturing
Tanner EDA by Mentor Graphics
University Wafer