Dear

I think you can use RIE to do O2  treatmentt, it do well.
But the power must be as low as possible and  treatment only need  10~20
sec.

Hope that can help you!


C.M. Lin

   IAM, NTU, Taiwan
   E-mail: [email protected]


----- Original Message -----
From: "Zhizhong Yin" 
To: 
Sent: Thursday, May 20, 2004 2:19 AM
Subject: [mems-talk] Bonding a plastic cover on a quartz chip with
platinumheaters


>
> Dear all,
>
> I am making a micropump by a quartz chip with a row of heaters and a
> plastic (acrylic) plate with a channel and input/output port.
> For previous work, I span a very thin PDMS layer  (a few micron) on the
> plastic plate before laser-machining the channel and ports, then align it
> with the chip under microscope and use a hard plate to press them
> together.
>
> It works fine at the beginning but starts to leak after several days' use
> since there is no perminent bonding between the chip and the PDMS layer.
>
> Now, I want to improve the bonding. Anybody has any suggestion?
>
> The quartz chip was already wire-bonded to a PC board and the thinkness
> of the platinum wire is 200 nm. I don't have O2 plasma but I do have an
> oven.
>
> Thanks a lot
>
> Zhizhong Yin
> Phone#: 410-516-8525(o)          Johns Hopkins University
>         410-662-4760(h)          223 Latrobe Hall
> email:[email protected]     3400 N. Charles Street
> homepage:www.me.jhu.edu/~zzyin   Baltimore MD 21218
> ***********************************************************
>
>
>
>
>
>