Dear Raj Kumar,
I think that increasing the temperature will result in
obtaining the smooth surfaces.
Regards,
Mahdi Bagheri

Raj Kumar  wrote:
Hello! Everybody
I am observing ditches at the periphery of diaphragm
etched in
silicon with KOH etching. These ditches are at the
intersection of etch
front i.e. 100 plane and sloped wall i.e. 111 plane
and are 2-3 micron
deep. I am using 40% HOH at 80 deg. C.

We also observed same problem with Isopropyl alcohol
(IPA) addition. Can
anybody suggest the cause and solution of this
problem.

RAJKUMAR

SCL, India





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