Hello Mems-Talkers,

 Does anybody know of a wet etchant or dry etchant which will selectively
etch Silicon and or SiO2 while leaving the Niobium unetched? Alternately I may
grow the Niobium on SiO2 layer as opposed to the Silicon and use the SiO2 as an
etch stop. After I will need to etch the SiO2 from under the Niobium. Keep up
the good work everybody.Thank You.

Sincerely,

Miguel Zorn