A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Niobium resistant Silicon Etching
Niobium resistant Silicon Etching
2004-05-23
[email protected]
2004-05-24
Kirt Williams
Niobium resistant Silicon Etching
Kirt Williams
2004-05-24
Miguel (and everyone else asking etching questions)--
Do a literature search on etchants for micromachining. You will find this
paper:
http://microlab.berkeley.edu/labmanual/chap1/JMEMSEtchRates2(2003).pdf
5:1 BHF etches SiO2, but not Nb or Si.
There are other etchant/material combinations that provide reasonable
selectivity.
    --Kirt Williams

----- Original Message -----
From: 
To: 
Sent: Sunday, May 23, 2004 12:15 AM
Subject: [mems-talk] Niobium resistant Silicon Etching


> Hello Mems-Talkers,
>
>  Does anybody know of a wet etchant or dry etchant which will selectively
> etch Silicon and or SiO2 while leaving the Niobium unetched? Alternately I
may
> grow the Niobium on SiO2 layer as opposed to the Silicon and use the SiO2
as an
> etch stop. After I will need to etch the SiO2 from under the Niobium. Keep
up
> the good work everybody.Thank You.
>
> Sincerely,
>
> Miguel Zorn
> _______________________________________________
> [email protected] mailing list: to unsubscribe or change your list
> options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
> Hosted by the MEMS Exchange, providers of MEMS processing services.
> Visit us at http://www.memsnet.org/



reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Mentor Graphics Corporation
Addison Engineering
Process Variations in Microsystems Manufacturing
MEMStaff Inc.