Miguel (and everyone else asking etching questions)--
Do a literature search on etchants for micromachining. You will find this
paper:
http://microlab.berkeley.edu/labmanual/chap1/JMEMSEtchRates2(2003).pdf
5:1 BHF etches SiO2, but not Nb or Si.
There are other etchant/material combinations that provide reasonable
selectivity.
    --Kirt Williams

----- Original Message -----
From: 
To: 
Sent: Sunday, May 23, 2004 12:15 AM
Subject: [mems-talk] Niobium resistant Silicon Etching


> Hello Mems-Talkers,
>
>  Does anybody know of a wet etchant or dry etchant which will selectively
> etch Silicon and or SiO2 while leaving the Niobium unetched? Alternately I
may
> grow the Niobium on SiO2 layer as opposed to the Silicon and use the SiO2
as an
> etch stop. After I will need to etch the SiO2 from under the Niobium. Keep
up
> the good work everybody.Thank You.
>
> Sincerely,
>
> Miguel Zorn
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