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MEMSnet Home: MEMS-Talk: Heidelberg DWL machine problem
Heidelberg DWL machine problem
2004-05-22
Li Wang
2004-05-24
Mark M Crain
Heidelberg DWL machine problem
Mark M Crain
2004-05-24
Hi Li,

I have seen this when I have changed the write head and forgot to change
the write head setting in the software, or when I have used an energy
setting that is too low.

Best of Luck

Mark
University of Louisville

>>> [email protected] 05/22/04 12:33 PM >>>
Hello,

I met a problem with Heidelberg DWL machine when I made mask. The
machine
is to scan the blank mask to directly expose out the pattern on mask. My

problem is that I found the exposed area are not fully covered by the
scan
line. After developing I can see the scan line and the unexposed area
between the scan line which I also want to expose. Did anybody has idea
about this problem? This is weekend and I can not reach the manufacture.
So
I resort to this board to get a quick answer. Please reply directly to
my
email address.
Thanks in advance.

Li Wang
Carnegie Mellon University




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