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MEMSnet Home: MEMS-Talk: Bonding PDMS to metal films
Bonding PDMS to metal films
2004-05-25
George Lopez
Bonding PDMS to metal films
George Lopez
2004-05-25
MEMS-talk,
        Does anyone have experience bonding PDMS to substrates that have
metal films deposited on them?  I know that using an oxygen plasma creates
a strong bond between PDMS and silicon or glass substrates, but it
seems there isn't a strong bond when substrates have metal films.
        Please reply to my email address only.
                George




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