I am not quite sure what you mean by stable accumulation. What is flatband
shift you are getting? Have you tried any lower frequency measurements on
these samples?
Niv
----- Original Message -----
From: "Ning Yang" 
To: 
Sent: Friday, May 28, 2004 4:55 PM
Subject: [mems-talk] cv measurement for MSQ film


> Hi:
> Does anyone have experience with cv curve measurement for MSQ film? I have
> wafers are Si substrate, 4000 A MSQ film (spin on) and need to measure the
> cv curve with HP 4284A (-40----40V, 1MHz). But the result always have a
> negative shift and cannot show a stable accumulation region. But due to
> thermal stability MSQ cannot anneal on temperature over 425C.
>
> I'm wondering if anyone has done this before and can give me some advice?
I
> highly appreciate your help.
>
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