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MEMSnet Home: MEMS-Talk: Passivation layer thickness in DRIE
Passivation layer thickness in DRIE
2004-05-31
Shawn Zhang
Al mask for RIE (CHF3)
2004-06-07
Dau Thanh Van
2004-06-01
Burkhard Volland
Passivation layer thickness in DRIE
Shawn Zhang
2004-05-31
Dear Sir or Madam,
I want to know the general passivation layer (C4F8) thickness in DRIE. Is it
several hundreds nanometer thick? Could you recommend the way to mesure the
passivation layer thickness? Thank you very much for your help.
Regards,
Shawn
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