YES, easy answer is Image Reversal.  I will contact with full details.  Bill
Moffat

-----Original Message-----
From: [email protected] [mailto:[email protected]]
Sent: Sunday, May 30, 2004 7:57 PM
To: [email protected]
Subject: [mems-talk] Development problem


Dear Sir
My pattern is pillars array
Period 300nm, one pillar diameter 100nm
After development,
Some pillars are still there, but some collapse
And the ratio chages.
Seldom it's perferct.
Is there a way to do it perfectly always?
Thank you

Best regard



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