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MEMSnet Home: MEMS-Talk: How can I strip off ARC from GaP
How can I strip off ARC from GaP
2004-05-31
[email protected]
2004-06-01
BRAD JOHNSON
Gold/photoresist etching problems
2004-06-01
Patrick Poissant
How can I strip off ARC from GaP
BRAD JOHNSON
2004-06-01
Try an RCA1 (SC1) dip.  This has worked for me but it is slow.  If you do not
have any metal an over night dip in room temp RCA1 should do the trick.
Good luck,
Brad Johnson
Applications Engineer
SUSS MicroTec
[email protected]





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