Hello all,



I put gold on photoresist and I want to etch that gold in my process. I used
the KI/I2/H2O solution but it seems to attack my photoresist since I'm not
able to take it off after the etching. I tried HCl:HNO3 3:1 but it severely
attacks my nickel structures.



Is it normal the KI solution do strange things on photoresist?

Is there any other gold enchants that is selective on nickel?



I could use any other metal than gold that is selective on nickel but it
needs to don't crack on baked photoresist (95°C) in an oven.



Thanks for any help



Patrick Poissant
___________________________________________________
   M.A.Sc. Student
   Dept. of Electrical Engineering
   Université de Sherbrooke
   Sherbrooke (Québec) J1K 2R1
   CANADA
   patrick.poissant at usherbrooke.ca
   Sherbrooke Microelectronics Research Group
   www.gel.usherb.ca/gms

   Anyone who has never made a mistake has never tried anything new - Albert
Einstein