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MEMSnet Home: MEMS-Talk: HMDS onto SiO2
HMDS onto SiO2
2004-06-02
Suyong Jung
2004-06-02
Brubaker Chad
2004-06-02
Michael D Martin
2004-06-03
Bill Moffat
HMDS onto SiO2
Suyong Jung
2004-06-02
Hello folks

Is there somebody who knows the way to check the quality of HMDS coated on
SiO2.
 From the knowledge that I've collected so far, normally people try a
contact angle method, but
, as you know, SiO2 is also hydrophobic just like HMDS is.
I would like to check the qualify of HMDS, and the completeness of HMDS
monolayer coating onto the wafer as well.

Thanks in advance

Suyong





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