Hello folks
Is there somebody who knows the way to check the quality of HMDS coated on
SiO2.
From the knowledge that I've collected so far, normally people try a
contact angle method, but
, as you know, SiO2 is also hydrophobic just like HMDS is.
I would like to check the qualify of HMDS, and the completeness of HMDS
monolayer coating onto the wafer as well.
Thanks in advance
Suyong