Suyong,

I think you have it backwards - silicon dioxide is hydrophilic, while pure, bare
silicon is extremely hydrophobic.

The reason why contact angle improves when HMDS is applied to a silicon wafer is
that a pure, bare silicon wafer is extremely rare - the silicon surface reacts
rapidly with ambient air to form a native oxide layer, thus causing the surface
to become hydrophilic.

Best Regards,

Chad Brubaker

EV Group       invent * innovate * implement
Technology - Tel: (602) 437-9492, Fax: (602)437-9435 e-mail:
[email protected], www.EVGroup.com

This message and any attachments contain confidential or privileged information,
which is intended for the named addressee(s) only. If you have received it in
error, please notify the sender immediately and then delete this e-mail. Please
note that unauthorized review, copying, disclosing, distributing or otherwise
making use of the information is strictly prohibited.

 -----Original Message-----
From:   [email protected] [mailto:mems-talk-
[email protected]]  On Behalf Of Suyong Jung
Sent:   Wednesday, June 02, 2004 11:19 AM
To:     [email protected]
Subject:        [mems-talk] HMDS onto SiO2

Hello folks

Is there somebody who knows the way to check the quality of HMDS coated on
SiO2.
 From the knowledge that I've collected so far, normally people try a
contact angle method, but
, as you know, SiO2 is also hydrophobic just like HMDS is.
I would like to check the qualify of HMDS, and the completeness of HMDS
monolayer coating onto the wafer as well.

Thanks in advance

Suyong




_______________________________________________
[email protected] mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/