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MEMSnet Home: MEMS-Talk: HMDS onto SiO2
HMDS onto SiO2
2004-06-02
Suyong Jung
2004-06-02
Brubaker Chad
2004-06-02
Michael D Martin
2004-06-03
Bill Moffat
HMDS onto SiO2
Michael D Martin
2004-06-02
SiO2 is hydrophilic. If you prime this surface with HMDS you will see a
dramatic effect.

-Mike


>>> [email protected] 6/2/2004 2:18:57 PM >>>
Hello folks

Is there somebody who knows the way to check the quality of HMDS coated
on
SiO2.
 From the knowledge that I've collected so far, normally people try a
contact angle method, but
, as you know, SiO2 is also hydrophobic just like HMDS is.
I would like to check the qualify of HMDS, and the completeness of HMDS

monolayer coating onto the wafer as well.

Thanks in advance

Suyong




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