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MEMSnet Home: MEMS-Talk: Gold clean chemistry
Gold clean chemistry
2004-06-02
Edward Keough
2004-06-03
Rick Morrison
2004-06-02
Michael D Martin
Gold clean chemistry
Michael D Martin
2004-06-02
You might try vacuum baking your chip before piranah. We've noticed that
residual moisture on samples going into Piranah will affect selectivity,
e.g. aluminum attack. Or you could use an oxygen plasma...

-Mike

>>> [email protected] 6/2/2004 5:20:34 PM >>>
Hello,

I have pure gold-layered silica electrodes (thin gold layer on glass)
that I would like to completely decontaminate after sensing uses, can
anyone reccomend a wet gold cleaning process that will not etch my gold

or silica.

I was recomented to use Piranah, but that does etch my gold after a
period of time.

Thank you,
Ed



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