>From: "Patrick Poissant" 
>Reply-To: General MEMS discussion 
>To: 
>Subject: [mems-talk] Gold/photoresist etching problems
>Date: Tue, 1 Jun 2004 16:52:04 -0400
>
>Hello all,
>
>
>
>I put gold on photoresist and I want to etch that gold in my process. I
>used
>the KI/I2/H2O solution but it seems to attack my photoresist since I'm not
>able to take it off after the etching. I tried HCl:HNO3 3:1 but it severely
>attacks my nickel structures.
>
>
>
>Is it normal the KI solution do strange things on photoresist?
>
>Is there any other gold enchants that is selective on nickel?
>
>
>
>I could use any other metal than gold that is selective on nickel but it
>needs to don't crack on baked photoresist (95°C) in an oven.
>
>
>
>Thanks for any help
>
>
>
>Patrick Poissant


Patrick,

I use KI/I2/H20 solution and it works good. Try using the resist strippers
after etching. Also you said you deposit Au on top of photoresist : Do you
use same photoresist for etching gold ? You can also do lift off and see if
it works.

Let me know if you need anything else.

Aasutosh Dave

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