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MEMSnet Home: MEMS-Talk: Al mask for RIE (CHF3)
Passivation layer thickness in DRIE
2004-05-31
Shawn Zhang
Al mask for RIE (CHF3)
2004-06-07
Dau Thanh Van
2004-06-01
Burkhard Volland
Al mask for RIE (CHF3)
Dau Thanh Van
2004-06-07
Dear Sir or Madam,
I want to know the effect of CHF3 in DRIE to the Aluminum wire.
I etched the SiO2 by RIE with CHF3, using Al as the mask in 5 minute. It
seem that the Al wire is damage after that. Please tell me if the CHF3 do
attack the Al.
Regards,
Shawn




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