Hi,
try Ni or Pt or TiW
Rick Morrison
Radant Mems
Rick
-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf
Of Tripp, Marie Kathleen
Sent: Tuesday, June 08, 2004 12:41 PM
To: General MEMS discussion
Subject: [mems-talk] Metal Question
Hi Everyone, I was wondering if someone could suggest a metal which will
adhere to Alumina and can be patterned with liftoff and will survive (at
least for a while) in HF? I tried Chromium but was unsuccessful. I
throught that I'd ask before I tried too many other metals.
Thanks,
Marie
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