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Metal Question
2004-06-08
Tripp, Marie Kathleen
2004-06-08
Rick Morrison
2004-06-08
Borski, Justin
Metal Question
Rick Morrison
2004-06-08
Hi,

try Ni or Pt or TiW

Rick Morrison
Radant Mems

Rick


-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf
Of Tripp, Marie Kathleen
Sent: Tuesday, June 08, 2004 12:41 PM
To: General MEMS discussion
Subject: [mems-talk] Metal Question


Hi Everyone,  I was wondering if someone could suggest a metal which will
adhere to Alumina and can be patterned with liftoff and will survive (at
least for a while) in HF?  I tried Chromium but was unsuccessful.  I
throught that I'd ask before I tried too many other metals.

Thanks,
Marie

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