Just curious to know why a "MEMS cleanroom" should remain gold free?  I
know the obvious answer (Au contamination) but wonder why a MEMS fab
needs to be identical/compatable to CMOS fabs.  Seems limiting to me.

Regards,
Mike

-----Original Message-----
From: Cyrille Hibert [mailto:[email protected]]
Sent: Tuesday, June 08, 2004 4:59 AM
To: [email protected]
Subject: [mems-talk] microelectronic compatible material


Dear All,

In MEMS cleanroom people usually try to remain microlectronic compatible
(no gold...). Does anybody has a good reference to know which material
can be considered compatible with "standard" IC processing? What is
about Ni?

Regards,
Cyrille.


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