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MEMSnet Home: MEMS-Talk: How to make an SEM sample?
How to make an SEM sample?
2004-06-09
Josef Kouba
2004-06-09
Jon Hiller
2004-06-11
Josef Kouba
2004-06-11
Isaac Wing Tak Chan
2004-06-09
Campe, Steve
2004-06-10
Tripp, Marie Kathleen
2004-06-11
Josef Kouba
2004-06-11
Mac McReynolds
2004-06-11
Borski, Justin
How to make an SEM sample?
Josef Kouba
2004-06-11
Hi Jon,

do you know how if there are any restrictions of FIB cutting regrding the
thickness of the cutted material?

Thanks

J.


> Josef,
> If classical sawing creates a problem you can use a dual beam FIB to
create
> the cross-section.  If you don't have access to such a tool you could try
> scribing the back side and the cleaving it.
> Jon Hiller




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