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MEMSnet Home: MEMS-Talk: How to make an SEM sample?
How to make an SEM sample?
2004-06-09
Josef Kouba
2004-06-09
Jon Hiller
2004-06-11
Josef Kouba
2004-06-11
Isaac Wing Tak Chan
2004-06-09
Campe, Steve
2004-06-10
Tripp, Marie Kathleen
2004-06-11
Josef Kouba
2004-06-11
Mac McReynolds
2004-06-11
Borski, Justin
How to make an SEM sample?
Mac McReynolds
2004-06-11
Josef,

we used to deal with a similar problem by scribing silicon first, then
dipping in LN2 (makes the polymer extremely brittle), and then breaking.
Not elegant, but might work for you

Mac McReynolds
Process Development Manager
Caliper Life Sciences
605 Fairchild Drive
Mountain View, CA 94043-2234
Tel:  650-623-0710
Fax:  650-623-0521




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