Josef,
we used to deal with a similar problem by scribing silicon first, then
dipping in LN2 (makes the polymer extremely brittle), and then breaking.
Not elegant, but might work for you
Mac McReynolds
Process Development Manager
Caliper Life Sciences
605 Fairchild Drive
Mountain View, CA 94043-2234
Tel: 650-623-0710
Fax: 650-623-0521
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