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MEMSnet Home: MEMS-Talk: Ti/TiO2 selective etch
Ti/TiO2 selective etch
2004-06-14
Sachin Rane
Ti/TiO2 selective etch
Sachin Rane
2004-06-14
Hi,
How do you etch away Ti without affecting TiOx ? Will NH4OH/H2O2 work
for this?
Thanks
SR
reply
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