Dear

  If your procedure is for micro-molding and fabricate the SU-8 master.
  I suggest the exposure time down to 1/3. It has good adhession on glass
but it will damage by acetone.


C.M. Lin
Microfluidics Lab, NTU,TW



----- Original Message -----
From: "annuar" 
To: 
Sent: Tuesday, June 15, 2004 8:55 AM
Subject: [mems-talk] SU-8 adhesion to glass substrate


> Hi everyone.
> I'm having problem coating my glass slide with SU-8 resist. It seems that
> the SU-8 does not adhere very well to glass. After developing, some part
of
> my patterns are lifted off. Does anyone know how to solve this problem?
Does
> the softbake or PEB have anything to do with this? Thanks.
>
> Abang Annuar
>
>
>
>
>