Hello,

Doesn't this will undercut the SU-8 bottom layer at the development step?


Patrick Poissant
___________________________________________________
   M.A.Sc. Student
   Dept. of Electrical Engineering
   Université de Sherbrooke
   Sherbrooke (Québec) J1K 2R1
   CANADA
   [email protected]
   Sherbrooke Microelectronics Research Group
   www.gel.usherb.ca/gms

   Anyone who has never made a mistake has never tried anything new - Albert
Einstein

----- Original Message -----
From: "Cheng Ming Lin" 
To: "General MEMS discussion" 
Sent: Tuesday, June 15, 2004 9:44 PM
Subject: Re: [mems-talk] SU-8 adhesion to glass substrate


> Dear
>
>   If your procedure is for micro-molding and fabricate the SU-8 master.
>   I suggest the exposure time down to 1/3. It has good adhession on glass
> but it will damage by acetone.
>
>
> C.M. Lin
> Microfluidics Lab, NTU,TW
>
>
>
> ----- Original Message -----
> From: "annuar" 
> To: 
> Sent: Tuesday, June 15, 2004 8:55 AM
> Subject: [mems-talk] SU-8 adhesion to glass substrate
>
>
> > Hi everyone.
> > I'm having problem coating my glass slide with SU-8 resist. It seems
that
> > the SU-8 does not adhere very well to glass. After developing, some part
> of
> > my patterns are lifted off. Does anyone know how to solve this problem?
> Does
> > the softbake or PEB have anything to do with this? Thanks.
> >
> > Abang Annuar
> >
> >
> >
> >
> >
>
>
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