I need to bond together three 4" silicon wafers on which MEMS devices are
located.  I am thinking about using glass frit techniques.  I have wafer fab
background, but have not done bonding before.  I will need a bonder.  Does
anyone have a bonder they love, that they could recommend me to buy?  Has
anyone used a foundry for bonding that worked out well?  Thanks!



Andrea Tombros

PCB Piezotronics

360-391-0863

[email protected]