A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Re: MEMS texts for beginner
Re: MEMS texts for beginner
1998-03-03
YI-KUEN LEE
1998-03-05
Knut Buettner
Re: MEMS texts for beginner
YI-KUEN LEE
1998-03-03
Hello Shigc:

      The book by Madou is very comprehensive
       "Fundamentals of Microfabrication", M.J. Madou, CRC Press,
September 1997.

      You can go to
http://www-s2k.arc.nasa.gov/mems/mono.html
to find more books and info.




Yi-Kuen Lee

PhD student
Department of Mechanical and Aerospace Engineering
School of Engineering and Applied Science
University of California, Los Angeles

phone # (O) 310-825-1350  310-825-9540  310-825-8275
        (H) 310-267-7521  310-541-8834
fax   #     310-825-1350
email address = [email protected]

On Sat, 28 Feb 1998, shigc wrote:

> Dear colleges,
> I am searching a book about MEMS technology.I want it to be a text book for
> beginners.
> Thanks for any help!
>
> sincerely
> Dasse
> [email protected]
>
>


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMS Technology Review
Harrick Plasma, Inc.
Nano-Master, Inc.
Tanner EDA by Mentor Graphics