Dear MEMS COMMUNITY,

This is Jungsik Kim in the University of Birmingham.

I have been used GTA(Thermogravimetric analysis) for SU-8 under Nitrogen
atmosphere and ambient air conditions.
Under N-gas, nearly 20% mass of SU-8(mostly Carbon) remained, but under
air with Oxygen, almost all of them were burned out.

Therefore, I'm searching for help.
Has anyone knows chemical composition of SU-8?

If yes, please let me know that.

Best wishes,

Jungsik Kim

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Mr. Jung-Sik, Kim
School of Manufacturing and Mechanical Engineering
The University of Birmingham
Edgbaston, Birmingham B15 2TT
Tel:  44 (0)121 414 4245
Fax: 44 (0)121 414 3958
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