Hello Jungsik,

I've done TGA analysis on SU8-2100 (~75%SU8, ~25%Solvent).  I got between 20-25%
mass left over under nitrogen atmosphere.  There are several mixes of SU8 which
differs only in their solvent content.  You can go to www.microchem.com where
you can
find composition of the different mixes of SU8.

Hope this helps.

Christian.

--
Christian Antonio

Industrial Research Institute Swinburne (IRIS)
533-545 Burwood Road,
Hawthorn, VIC., Australia 3122.
Tel :  +61 3  9214 5698
Fax : +61 3  9214 5050