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MEMSnet Home: MEMS-Talk: SU 8 Photoresist
SU 8 Photoresist
2004-06-24
Yeswanth Rao
2004-06-25
Patrick Poissant
2004-06-30
Lee, Duhyun
2004-06-25
Brubaker Chad
SU 8 Photoresist
Yeswanth Rao
2004-06-24
Dear All,



I would like to use SU 8 photoresist to get a uniform coating of 1.7
micron on Si and Si/Cr. I have SU-8 2025 photoresist and SU 8 thinner.
Would it be possible to use this thinner to reduce the viscosity of the
2025 resist to get down to 1.7 micron thickness? If that is possible,
would anyone be able to able to guide me as to what should be ratio of
this mixture to achieve this thickness. Thanks in advance



Yeswanth L Rao

Graduate Research Assistant

Micro/Nano Fabrication Laboratory

Driftmier Engineering Center

University of Georgia

Athens, GA 30602


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