Anodic bonding of Pyrex to nitride has been reported by several sources.  In
general, the conditions will be similar to that for silicon to glass.  However,
key factors are that a higher initial voltage may be required, and the surface
preparation of the nitride is important

Best Regards,

Chad Brubaker

EV Group       invent * innovate * implement
Technology - Tel: (602) 437-9492, Fax: (602)437-9435 e-mail:
[email protected], www.EVGroup.com

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 -----Original Message-----
From:   [email protected] [mailto:[email protected]]  On
Behalf Of Rahul Agarwal
Sent:   Thursday, June 24, 2004 8:31 PM
To:     [email protected]
Subject:        [mems-talk] anodic bonding with nitride on silicon wafer

Hello everyone,
I wanted to know if any of you has any experience in doing anodic bonding
of
a n-type wafer with 1000A thick nitride (LPCVD), to a pyrex glass
wafer. All the suggestions will be highly appreciated.
Thanks
Rahul agarwal