Hello,

I have seen some oblique references in the literature to the dependence
of silicon mechanical properties upon oxygen concentration.  I would
appreciate any detailed references which the readers of MEMS-Talk might
offer.

Best regards,

Al Henning

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Albert K. Henning, Ph.D.
Director of Technology                650-617-0854
Redwood Microsystems, Inc.            650-326-1899 (FAX)
959 Hamilton Avenue                   [email protected]
Menlo Park, CA  94025                 http://www.redwoodmicro.com