Hi Han,

Dow Corning makes a silicone based paste containig ZnO2 that is commonly
used for this purpose.

Jobert van Eisden
School of Nanoscale Science and Engineering
University at Albany, NY

-----Original Message-----
From: [email protected]
[mailto:[email protected]]On Behalf Of [email protected]
Sent: Thursday, July 08, 2004 5:49 PM
To: [email protected]
Subject: Re: [mems-talk] Question about thermal conductive glue for drie


We sometimes use Fomblin oil and it seems to help with heat spread. In a
message dated 7/8/2004 2:40:03 PM Eastern Daylight Time, "Han Geun Yu"
 writes:

>Hi, I am struggling with heat problem of substrate while doing drie.
Because I use small piece, I need carrier wafer to do drie and I think it
makes heat to flow little. If you know any glue or greese to increase the
heat flow, please let me know.
>
>Thank you.
>
>Han
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