I've tried small pieces in DRIE before.

Just spinning coating a thin layer (2um) photoresist on top of carrier
wafer and sticking sample to it on top, followed by hard bake, would
help. Usually, I use AZ 9260 or 7220. Other PR should work also.

Guo Xun



-----Original Message-----
From: Han Geun Yu [mailto:[email protected]]
Sent: Friday, July 09, 2004 2:40 AM
To: [email protected]
Subject: [mems-talk] Question about thermal conductive glue for drie

Hi, I am struggling with heat problem of substrate while doing drie.
Because I use small piece, I need carrier wafer to do drie and I think
it makes heat to flow little. If you know any glue or greese to increase
the heat flow, please let me know.

Thank you.

Han