Use a ratio of 50/50 like 25 sccm/25 sccm pressure 150 mtorr, power 300 watts
rie and hope the chrome is not too thick for the resist to burn during the etch.
Bob Henderson


In a message dated 7/12/2004 10:11:57 AM Eastern Daylight Time, "Greg Reimann"
 writes:

>Hi all,
>
>Does anyone have a good RIE recipe for etching chrome?  I have heard
>chlorine and oxygen are the way to go, but I don't know anything about
>mixture, pressure, or power.
>
>Thanks,
>Greg
>
>
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