Hi Greg,

        Try this article. It may give you some hints. Best of luck!

H. Nakata et al., "Plasma etching characteristics of chromium film and
its novel etching mode," J. Vac. Sci. Technol. Vol.17, No.6, pp. 1351,
1980


Yours sincerely,

Isaac Chan

Ph.D. Candidate
Dept. Electrical & Computer Engineering
University of Waterloo
200 University Ave. W
Waterloo, Ontario, Canada
N2L 3G1
Tel: (519) 888-4567, ext. 6014
Fax: (519) 746-6321
[email protected]
http://www.ece.uwaterloo.ca/~a-sidic

On Mon, 12 Jul 2004, Greg Reimann wrote:

> Hi all,
>
> Does anyone have a good RIE recipe for etching chrome?  I have heard
> chlorine and oxygen are the way to go, but I don't know anything about
> mixture, pressure, or power.
>
> Thanks,
> Greg
>
>
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