Dear colleagues,

Any suggestions for avoiding cracking in Su8?
am using the 2100 Su8, and am making 100 microns features and follow
exactly the recipe suggested by microchem, seems like theres still small
cracks at the border of my 10 microns structures,

any suggestions are very helpful,

regards,



Amani Salim
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Research Assistant
Department of Electrical and Computer Eng.
U of Minnesota,T.C.
UMBM Lab
Office phone: 612 626-0590
Lab phone: 612-626-7188