Hi,
it' s not a long time that I use Coventor, but I think that (about the
second question) the Process Editor is only a very simple and very
approximate way to model a process. Its aim is to permit, togheter with the
Layout Editor, to build a solid model with the geometry you desire. So, I
think you can' t set the process temperature. For example, you can't also
set the specific etchant (e.g HCl). You can only set the etch type. This is
what I've learned using the Process Editor.
I hope this will help you.
Alessandro.
----- Original Message -----
From: "Sudhanshu Garg"
To: "General MEMS discussion"
Sent: Wednesday, July 14, 2004 10:50 AM
Subject: [mems-talk] Coventor Doubt
>
> Hi,
>
> Two questions regarding Coventor:
>
> 1) I am using Coventor to deposit p-type/n-type silicon. These materials
> don't exist in the MPD. If I google and chase for properties that coventor
> asks for, I rarely get all of them. Simulation with only a few of them
> aboard is not of any use. Any idea where I can get all of them ?
>
> 2) The process editor doesn't allow specification of temperature at
> which a particular process is being carried out. You have to feed that in
> the corresponding material's property entry. This is not at all realistic
> and if I can't get away with this - I will have to switch 'back' to
> Intellisense. Help ??
>
> thanks,
> SGarg
>
> ~*~
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