A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: KOH wafer edge protection for long etches
KOH wafer edge protection for long etches
2004-07-18
arthur beyder
2004-07-19
Brubaker Chad
KOH wafer edge protection for long etches
arthur beyder
2004-07-18
I would like to protect the edges of my wafers during long KOH etches
(8-10hrs, 500um deep).  I am etching my wafers on both sides, thus I
can't spin on protective layers (such as ProTec or BPR100).  Does anyone
know whether I can paint these on and then bake the wafers to cure?  Are
there any other approaches for KOH protection?

Thank you,
Arthur Beyder



reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Tanner EDA by Mentor Graphics
The Branford Group
MEMStaff Inc.
MEMS Technology Review