I would like to protect the edges of my wafers during long KOH etches
(8-10hrs, 500um deep). I am etching my wafers on both sides, thus I
can't spin on protective layers (such as ProTec or BPR100). Does anyone
know whether I can paint these on and then bake the wafers to cure? Are
there any other approaches for KOH protection?
Thank you,
Arthur Beyder