Hi,Kirt Williams:

  Do you need to bake the polyimide before you do wet etching? Another question
is,will photoresist work as well as chromium?

  Thanks a lot.

Ping Zhang




==============

>We've tried a number of etchants for PI 2556, which I will guess is similar.
>Piranha worked, but is too fast.
>Microstrip 2001 (a commercial photoresist stripper), at 85 C, etched at
>about 0.5 um/min.
>You would have to use a hard mask such a thin layer of chromium.
>    --Kirt Williams
>
>----- Original Message -----
>From: 
>To: "mems-talk" 
>Sent: Wednesday, July 14, 2004 4:19 PM
>Subject: [mems-talk] Polyimide Wet Etch
>
>
>> Could anyone give me a recipe for wet etching polyimide (PI2555)? I tried
>several ways but nor worked.
>>
>> Thanks
>> - ware.
>>
>>
>>
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