Fritz,
      Off the shelf a vacuum high temperature oven that has multiple ramp
temperature settings.  It has a guaranteed low level of Oxygen, typically below
10 p.p.m., laminar flow, and hundreds out world wide, including automatic units.
Look up www.yieldengineering.com for complete details.  I will contact you later
to see if you want a technical visit.  Bill Muffed

-----Original Message-----
From: Michael D Martin [mailto:[email protected]]
Sent: Friday, July 16, 2004 12:28 PM
To: [email protected]
Subject: Re: [mems-talk] Polyimide Curing Tool


Hi Fritz,
  We use a two "tool" process 50 deg C - 200 deg C on a hotplate, then
into a tube furnace purged with nitrogen from 200-350 deg C.

-Mike


>>> [email protected] 7/16/2004 12:59:48 PM >>>
We are in the process of purchasing a tool for for controlled
3-temperature step nitrogen-ambient curing of polyimide films?  Could
someone describe the preferred tool either homemade or commercial?

Fritz Kub
Naval Research Laboratory
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