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MEMSnet Home: MEMS-Talk: a positive resist
a positive resist
2004-07-20
Amandine KUBIE
2004-07-22
aasutosh dave
a positive resist
Amandine KUBIE
2004-07-20
Hello,

I am looking for a resist, preferably a positive one, that I can use as
sacrifical layer.

The main problem is that the layer used over is made with a solvent that
can attack this sacrifical layer.

I already proved some of positive resists like AZ 4562, HPR 504, P100,
P1275 but also some negative resists like PL125, SC resist.

The positive resists are attacked by the solvent.
It happened that with negative resists, there is a good compatibility
with the solvent but the main problem is that these negative resists are
very hard to clean.

If you have an idea of a positive, solvent-resistant, resist that I can
try, I would be very thankful of your help.

Best Regards,

Amandine KUBIE


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